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Herald of Dagestan State Technical University. Technical Sciences

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Ismailov T.A., Zakharova P.R., Shangereeva B.A., Shakhmaeva A.R. RESEARCH PROCESS PLASMA ETCHING SIO2 MEMBRANE. Herald of Dagestan State Technical University. Technical Sciences. 2014;35(4):56-62. (In Russ.) https://doi.org/10.21822/2073-6185-2014-35-4-56-62

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ISSN 2073-6185 (Print)
ISSN 2542-095X (Online)