RESEARCH OF INTERRELATION OF A DESIGN AND MANUFACTURING TECHNIQUES OF SEMI-CONDUCTOR DEVICES WITH THEIR PENETRATIVE PRESSURE
https://doi.org/10.21822/2073-6185-2013-0-1(28)-26-31
Abstract
The estimation of influence of a design and technology of formation of transistor structure on value of penetrative pressure is spent. Dependences in SAD TCAD Synopsys for penetrative pressure from size of a superficial charge of various designs of the transistor are received.
References
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Review
For citations:
Shakhmaeva A.R. RESEARCH OF INTERRELATION OF A DESIGN AND MANUFACTURING TECHNIQUES OF SEMI-CONDUCTOR DEVICES WITH THEIR PENETRATIVE PRESSURE. Herald of Dagestan State Technical University. Technical Sciences. 2013;28(1):26-31. (In Russ.) https://doi.org/10.21822/2073-6185-2013-0-1(28)-26-31